Microstep Motor Module | Nanometer Precision Piezo Drive - Shanghai YiNGUAN Semiconductor Technology Co., LTD.

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Microstep Motor Module

Features

Nanometer-level stepping accuracy

High repeatability

Microsecond-level response

Theoretical infinite travel

Self-locking upon power loss

Selection Manual Get a quote

Technical Specifications

	PANL-R001-14-16H4Q	PANL-S06-22-5HTQ	PANL-S06-22-7H5Q	PANL-S06-22-12Q
Active axes	Z/X	Z/X	Z/X	Z/X
Height uniformity	≤0.03mm	≤0.03mm	≤0.03mm	≤0.03mm
Coplanarity of the top surface	≤5μm	≤5μm	≤5μm	≤5μm
Bottom surface coplanarity	≤5μm	≤5μm	≤5μm	≤5μm
Top-to-bottom surface parallelism	≤10μm	≤10μm	≤10μm	≤10μm
Actuating voltage of shear-mode ceramics	-250V~+250V	-250V~+250V	-250V~+250V	-250V~+250V
Longitudinal piezoelectric ceramic drive voltage	-250V~+250V	-250V~+250V	-250V~+250V	-
Shear piezoelectric ceramic displacement (Y-axis displacement)	≥±2μm@±250V	≥±7μm@±250V	≥±5μm@±250V	≥±12μm@±250V
Longitudinal piezoelectric ceramic displacement (Z-axis displacement)	≥3μm@500Vp-p(±250V)	≥0.9μm@500Vp-p(±250V)	≥1.5μm@500Vp-p(±250V)	-
Maximum output force of shear piezoelectric ceramics	≥±100N@±250V	≥±50N@±250V	≥±50N@±250V	≥±50N@±250V
Maximum output force of longitudinal piezoelectric ceramics	≥2000N@±250V	≥700N@±250V	≥1000N@±250V	-
Longitudinal mechanical stiffness of a single piezoelectric ceramic leg	≥500N/μm	≥250N/μm	≥250N/μm	≥250N/μm
Capacitance of shear piezoelectric ceramics	≤40nF±15%@1Vp-p&1kHz	≤45nF±15%@1Vp-p&1kHz	≤30nF±15%@1Vp-p&1kHz	≤90nF±15%@1Vp-p&1kHz
Capacitance of longitudinal piezoelectric ceramics	≤150nF±15%@1Vp-p&1kHz	≤40nF±15%@1Vp-p&1kHz	≤60nF±15%@1Vp-p&1kHz	-
Hysteresis nonlinearity of shear piezoelectric ceramics @500Vp-p	≤40%	≤40%	≤40%	≤40%
Operating temperature	-25℃ ~ 130℃	-25℃ ~ 130℃	-25℃ ~ 130℃	-25℃ ~ 130℃
Curie temperature	280℃	280℃	280℃	280℃
Dimensions
L	33mm±0.1mm	13mm±0.1mm	13mm±0.1mm	13mm±0.1mm
W	10mm±0.1mm	13mm±0.1mm	13mm±0.1mm	13mm±0.1mm
H	15mm±0.005mm	8.7mm±0.005mm	8.7mm±0.005mm	8.7mm±0.005mm

*Displacement Measurement: Drive voltage -250V to 250V, tolerance ±15%.
** Dimensions: The marked dimensions refer to the size of the single - side ceramic module, excluding the circuit board.
***Capacitance Measurement Conditions: Room temperature environment, 1 Vpp, 1 kHz, tolerance ±15%.

Customization Info

Drive Voltage: YiNGUAN can flexibly customize the maximum drive voltage of the device. The common available range for the maximum drive voltage we provide is 50V to 250V. Other special maximum drive voltages can also be customized flexibly according to customer requirements.

Displacement Customization: The output displacement is primarily determined by the device's dimensions. YiNGUAN offers a variety of combinations of shear and thickness displacements, with selectable displacement ranges.

Operating Frequency: YiNGUAN can flexibly design according to customer requirements. The maximum drive frequency for monolithic actuators can reach up to 50 kHz.

Form Factor Customization: The length, width, and height of the module can be customized flexibly according to customer needs.

Connection Options: While meeting the AWG usage standards, a wiring harness or flexible printed circuit board (FPC) can be optionally equipped. The length and orientation of the wiring harness, as well as the design of the circuit board, can also be customized flexibly according to customer requirements.