Founded in 2019, Shanghai YiNGUAN Semiconductor Technology Co., Ltd. is a high-tech innovative enterprise dedicated to the R&D and production of precision motion systems and core components for semiconductor equipment and advanced high-end equipment. The company has been recognized as a National Key "Little Giant" Enterprise, a testament to its specialization and innovation. The Group holds over 270 valid patents.
End-to-End Vertical Integration Capabilities
From core component R&D to the seamless integration of precision motion systems, we maintain mastery over proprietary core technologies to deliver superior and reliable solutions.
Building on our deep expertise in precision motion control and metrology, YiNGUAN is relentlessly pursuing next-generation technologies. Our innovation engine is powered by three cornerstone technologies: Piezoelectric Actuation, Magnetic Levitation Technology, and Vacuum-Grade System Integration. This foundation enables us to deliver diverse, mass-produced, high-performance solutions, directly addressing the critical need for industrial-grade core components in semiconductor equipment.
Solutions
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Pan-semiconductor platform -
Piezoelectric platform -
Vacuum platform -
Metrology platform -
Bonding platform
Motion Stage Products
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Mechanical-Bearing Rotary Stage -
Air-Bearing Rotary Stage -
Z Stage with pneumatic counterbalance -
Z Stage with maglev gravity compensator -
Heavy-load Z Stage -
Single-Axis Linear Stage
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Combined Stage with Dual Z-Axis -
Combined Stage with Single Z-Axis -
Maglev Polar Stage -
Metis Multi-Axis Stage -
Stacked XYT/XYZ Stage -
Stacked XYZ3T Stage -
Stacked 7-Axis Motion Stage
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Two-Axis Cross-Type Stage -
Flat integrated XY stage -
Flat XY stage with Aperture -
Gimbals & Optical Mounts -
Maglev ZT stage -
High-Spec Maglev ZT Stage
Essential Products
Multi-axis laser measurement and application platform
Fiber optic alignment module
Eddy current sensor
Grating ruler
Piezo actuator
Amplification actuator
Preloaded actuator
Piezo stepping motor
Inertia motor
Maglev voice coil motor
Magnetic levitation gravity compensator
Planar water-cooling voice coil motor
Disc motor module
Moving-magnet linear motor module
Motion Control System
Electrostatic Chuck Controller
Vacuum Pump Controller
Optional Products
Vacuum chuck
E-Pin
Electrostatic Chuck
Long mirror, Square mirror, Air Bearing Pad
Piezoelectric vibration damping table
Balanced mass vibration damping products
Mass damper products