Using piezoelectric stepping motor as motion actuators, high drive force, high holding force
Multi-axis parallel control
Millimeter-level large travel range
Integrated high-precision encoder, nanometer resolution
| Unit | Tolerance | PMNL-T23-ZT20A | |
| Active axes | Z | ||
| Motion & Positioning | |||
| Travel range in Z | mm | ±10 | |
| Travel range in rX | deg | ±1.1 | |
| Travel range in rY | deg | ±1 | |
| Sensor | Linear encoder | ||
| Open loop resolution | nm | 1 | |
| Sensor resolution | nm | 5 | |
| Sensor signal | AqB | ||
| Unidirectional repeatability in Z | nm | Typical value | ±50 |
| Unidirectional repeatability in rX | Typical value | ±1.2 µrad (0.25 arcsec) | |
| Unidirectional repeatability in rY | Typical value | ±1 µrad (0.21 arcsec) | |
| Bidirectional repeatability in Z | nm | Typical value | ±100 |
| Bidirectional repeatability in rX | Typical value | ±2.4 µrad (0.5 arcsec) | |
| Bidirectional repeatability in rY | Typical value | ±2 µrad (0.42 arcsec) | |
| Velocity | mm/s | Max. value | 1 |
| Mechanical properties | |||
| Vertical drive force | N | Typical value | 200 |
| Vertical holding force | N | Min. value | 300 |
| Drive properties | |||
| Operating voltage | V | -250~250V | |
| Miscellaneous | |||
| Operating temperature range | °C | 0~50 | |
| Material | Aluminum alloy, stainless steel | ||
| Cable length | m | ±0.02m | 1.5 |
| Motor interface | Sub-D25 male connector | ||
| Sensor connection | HD-Sub44 male connector | ||
| Dimensions | |||
| Length | mm | 240 | |
| Width | mm | 240 | |
| Height/td> | mm | 70~96 |
* Actual motion velocity depend on the power of the drive control circuit
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