Piezoelectric Inertia Motor | High-Speed Nano-Precision Stage - Shanghai YiNGUAN Semiconductor Technology Co., LTD.

Your Current Location: HOME > PRODUCTS > Piezoelectric Motor > Piezo Inertia Motor >

Piezoelectric Inertia Motor

Features

High-speed displacement

High resolution

Compact size

Suitable for high vacuum environments

Selection Manual Get a quote

Technical Specifications

	PMIN-C24X-20A	PMIN-C24X-30A	PMIN-C24X-50A	PMIN-C24X-110A	Unit	Tolerance
Active Axes	X	X	X	X	-
Travel range	20	30	50	110	mm
Sensor	Linear encoder	Linear encoder	Linear encoder	Linear encoder	-
Open loop resolution	1	1	1	1	nm
Sensor resolution	40	40	40	40	nm
Sensor signal	AqB(Microstep box output)	AqB(Microstep box output)	AqB(Microstep box output)	AqB(Microstep box output)	-
Min. displacement	-	-	-	-	nm	Typical value
Unidirectional Repeatability	500	500	500	500	nm	Typical value
Bidirectional Repeatability	800	1000	800	800	nm	Typical value
Pitch	50	50	50	50	arcsec	Typical value
Yaw	50	50	50	50	arcsec	Typical value
Closed loop velocity*	10	10	10	10	mm/s	Max. value
Mechanical Properties
Max. vertical load capacity	30	30	30	30	N	Max. value
Guide type	Cross roller guide
Drive Performance
Motor type	Stick-slip inertial motor
Drive force	1.5	1.5	1.5	1.0	N	Typical value
Holding force	2.0	2.0	2.0	1.5	N	Min. value
Operating voltage	0 - 70	0 - 70	0 - 70	0 - 70	V
Miscellaneous
Operating temperature range	0 - 50	0 - 50	0 - 50	0 - 50	°C
Drive frequency range	2k - 15k(Recommended Drive Frequency Range:5k - 7kHz)				kHz
Material	Aluminum Alloy / Stainless Steel (Optional)	Aluminum Alloy / Stainless Steel (Optional)	Aluminum Alloy/Stainless Steel (Base defaults to Stainless Steel)	Aluminum Alloy/Stainless Steel (Base defaults to Stainless Steel)	-
Cable length	2	2	2	2	m	±0.02m
Motor interface	Sub-D15 male connector	Sub-D15 male connector	Sub-D15 male connector	Sub-D15 male connector
Dimensions
A	24	24	24	24	mm
B	11.5	11.5	11.5	11.575	mm
L	45	45	75	180	mm

*PMIN-C24X-50A models default to a stainless steel base. For lightweight requirements, an aluminum alloy version (-AL) is available.
-AL: Aluminum alloy base
* The actual operating speed depends on the power of the drive and control circuit.
* Maximum vertical load: 30N, provided that the center of gravity of the load is located at the center of the motor.
All specifications are based on room temperature conditions (22±3°C).
Usage Precautions:
1. The motor must be used in a clean indoor environment;
2. The motor must be used in conjunction with the drive and control unit provided by YG.

PIN	Definition
1	Sin+
2	Sin-
3	Cos+
4	Cos-
5	Index+
6	Index-
7	/
8	HV-
9	GND
10	Vs
11	GND
12	Vs
13	/
14	/
15	HV+