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Shanghai YiNGUAN Semiconductor Technology Co., LTD.
Shanghai YiNGUAN Semiconductor Technology Co., LTD.
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Piezoelectric Stepping Motor
Features

High drive force

Nano precision

High static holding force

Large travel range

High resolution

Suitable for high vacuum environments

Selection Manual Get a quote
Applications
Lens precision adjustment
Precision semiconductor equipment
Precision electron microscope adjustment
Precision medical testing equipment
Non-magnetic environment
Vacuum without heating environment
Performance Chart

Technical Specifications
Parameter Name PMNL - C05 - 10N PMNL - C10 - 10N Unit Tolerance
Active axes X X - -
Travel range 10 10 mm -
Travel range (analog mode) ±2 ±2 μm -
Open loop resolution 1 1 nm Typical value
Velocity 1 1 mm/s Max. value
Max. drive frequency 250 250 Hz ±20%
Drive force 50 100 N Max. value
Holding force 70 130 N Min. value
Operating voltage -250~+250 -250~+250 V -
Operating temperature range 0 - 55 0 - 55 °C -
Material Aluminum, stainless steel, titanium Aluminum, stainless steel, titanium - -
Mass 115 160 g ±5%
Cable length 2 2 m ±0.05m
Motor interface Sub-D15 Male Connector Sub-D15 Male Connector - -
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